This document, created by Pennsylvania State University and hosted by the Nanotechnology Applications and Career Knowledge Network, serves as a guide for an activity where students "review the fundamental principles and the operation of a low pressure chemical vapor deposition (LPCVD) system." The activity guide includes objectives, an introduction to chemical vapor deposition (CVD) and overviews of LPCVD components, a video demonstrating LPCVD operation, and questions to test student comprehension. In order to access and download this material, users must complete a free registration.